Tokyo Electron Kabushiki Kaisha

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 2180
 
  
 
F27D DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE 718
 
  
 
F27B FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS618
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 454
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 333
 
  
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 3156
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 3359
 
  
 
B01D SEPARATION 1133
 
  
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 144
 
  
 
B25J MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 157

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6072325 Probe deviceJun 19, 96Jun 06, 00[G01R]
5770098 Etching processMar 16, 94Jun 23, 98[H01L]
5671903 Heat treatment apparatus and valve device for use in the sameDec 28, 94Sep 30, 97[F16K]
5665167 Plasma treatment apparatus having a workpiece-side electrode grounding circuitFeb 14, 94Sep 09, 97[C23C, H05H, C23F]
5645419 Heat treatment method and deviceMar 23, 95Jul 08, 97[F23D]
5639234 Treatment system and treatment apparatusSep 30, 94Jun 17, 97[F27B]
5622639 Heat treating apparatusJul 26, 94Apr 22, 97[F27B]
5585737 Semiconductor wafer probing method including arranging index regions that include all chips and minimize the occurrence of non-contact between a chip and a probe needle during chip verificationDec 22, 94Dec 17, 96[G01R]
5578132 Apparatus for heat treating semiconductors at normal pressure and low pressureJul 05, 94Nov 26, 96[C23C]
5554226 Heat treatment processing apparatus and cleaning method thereofMar 28, 95Sep 10, 96[C23C]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
RE36925 Vacuum treatment apparatus and a method for manufacturing semiconductor device thereinExpiredJun 02, 98Oct 31, 00[B08B]
5853486 Treatment system and treatment apparatus with multi-stage carrier storage chambersExpiredMar 25, 96Dec 29, 98[C23C]
5829939 Treatment apparatusExpiredJun 24, 96Nov 03, 98[H01L]
5777300 Processing furnace for oxidizing objectsExpiredNov 16, 94Jul 07, 98[H01L, H05B]
5750436 Thermal processing method and apparatus thereforExpiredJun 07, 95May 12, 98[H01L]
5697749 Wafer processing apparatusExpiredApr 11, 95Dec 16, 97[H01L]
5690998 Method of coating a conductive probe needleExpiredMar 29, 96Nov 25, 97[B05D]
5678989 Heat treatment method using a vertical processing tubeExpiredJun 12, 96Oct 21, 97[F27D]
5662469 Heat treatment methodExpiredMar 24, 95Sep 02, 97[F27D]
5592581 Heat treatment apparatusExpiredJul 18, 94Jan 07, 97[H01L, F27D]
5571010 Heat treatment method and apparatusExpiredJun 17, 94Nov 05, 96[F27D]
5562383 Treatment apparatusExpiredJan 05, 96Oct 08, 96[H01L]
5559446 Probing method and deviceExpiredJul 18, 94Sep 24, 96[G01R]
5532613 Probe needleExpiredApr 14, 94Jul 02, 96[G01R]
5520742 Thermal processing apparatus with heat shielding memberExpiredMar 01, 94May 28, 96[C23C]
D366868 Wafer boat or rackExpiredSep 29, 93Feb 06, 96[]
D365584 Semiconductor manufacturing deviceExpiredJun 06, 94Dec 26, 95[]
5478397 Heat treating deviceExpiredJun 10, 94Dec 26, 95[C23C]
5474641 Processing method and apparatus thereofExpiredOct 20, 93Dec 12, 95[C23F]
5464313 Heat treating apparatusExpiredFeb 04, 94Nov 07, 95[H01L, B65G, F27D]

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